Symposium L
NEMS/MEMS Technology and Devices


  • Ai-Qun LIU, Nanyang Technological University, Singapore
  • Tarik BOUROUINA, ESIEE, France


  • Vincent Chengkuo LEE, National University of Singapore, Singapore
  • Hua LI, Nanyang Technological University, Singapore
  • Gwo-Bin LEE, National Cheng Kung University, Taiwan
  • Franck CHOLLET, Universite de Franche Comte, France


  • Ai-Qun LIU
    Nanyang Technological University,
    School of Electrical & Electronic Engineering, 50 Nanyang Avenue, Singapore 639798
    Tel: (65) 67904336, Fax: (65) 67933318

Scope of Symposium

The emphasis of this symposium is on Nanoelectromechanical Systems (NEMS) /Microelectromechanical Systems (MEMS) technology and devices. Particularly applications that involve MEMS design, modeling, fabrication processes (e.g. semiconductors, polymers, etc.) lab-on-a-chip, and biophotonic medical devices (e.g. DNA, protein and cell sorting, etc.) are preferred. This symposium will explore new devices and processes innovation and engineering applications, especially related to NEMS/MEMS technology and devices.